Probe Table

Probe stations are mainly used in semiconductor industry, optoelectronics industry, integrated circuit and packaging testing. It is widely used in the research and development of precision electrical measurements of complex, high-speed devices, aiming to ensure quality and reliability, and reduce development time and device manufacturing process costs.

Probe stations can be distinguished in terms of operation: manual, semi-automatic, and fully automatic.

Functionally speaking, they are: temperature control probe station, vacuum probe station (ultra-low temperature probe station), RF probe station, LCD flat panel probe station, Hall effect probe station, surface resistivity probe station

Economical manual type

Customized according to customer needs

chuck Size:4"*4" 6"*6" 8"*8" 12"*12" （Optional）

X-Y movement stroke:4"*4" 6"*6" 8"*8" 12"*12"（Optional）

chuck Lifts and lowers 10mm in the Z-axis direction (optional) to facilitate quick separation of the probe and sample

Microscope: metallographic microscope, stereo microscope, monocular microscope (optional)

Microscope movement mode: column surrounding type, moving platform type, gantry structure type (optional)

Probe holder: 0.7um, 2um, 10um precision optional, magnetic adsorption with magnetic switch

Can be used with Probe card for testing

Applicable fields: wafer factories, research institutes, universities, etc.

Semi-automatic

chuck尺寸800mm/600mm

X, Y electric movement stroke 200mm/150mm

chuck coarse adjustment lifts and lowers 9mm, fine adjustment lifts and lowers 16mm

Can be used with MITUTOYO metallographic microscope or AEC solid microscope

The number of needle holders placed is 6 to 8

Microscope X-Y-Z movement range 2"x2"x2"

Can be used with Probe card for testing

Applicable fields: 8-inch/6-inch Wafer, IC testing products

Electric type

Chuck size is 1200mm, flatness is 1u (stainless steel or gold plated)

X, Y electric movement stroke 300mm x 300mm

chuck coarse adjustment lifts and lowers 9mm, fine adjustment lifts and lowers 16mm, fine adjustment accuracy is 1u

Can be used with MITUTOYO crystal microscope or AEC solid microscope

The number of needle holders placed is 8 to 12

Microscope X-Y-Z movement range 2"x2"x2"

Material: granite countertop + stainless steel

Can be used with Probe card for testing

Applicable fields: 12-inch Wafer, IC testing products

LCD semi-automatic probe station

Robot arm pick and place film

Electric, input coordinates to find position

Measuring size (mm): 1800x1600, 1300x1200, 1200x1000